 
				    2018 IEEE International Electron Devices Meeting (IEDM 2018)
 
 December 1-5, 2018, San Francisco, United States
 
 The following presentation reported on results of SUPERAID7:
 S. Barraud et al., Tunability of Parasitic Channel in Gate-All-Around Stacked Nanosheets
 in: Session 21 (Tuesday, December 4, 2:15 pm, Continental Ballroom 5): Process and Manufacturing Technology - Advanced Gate All Around Process
 Stability Under Process Variability for Advanced Interconnects and Devices Beyond 7 nm Node
                        Stability Under Process Variability for Advanced Interconnects and Devices Beyond 7 nm Node 
				     
				     
				     
				     
				     
				     
				     
				     
				     
				    